Effects of the Process Parameters on the Properties of...

Journal of Nanoscience and Nanotechnology 2019 / 03 Vol. 19; Iss. 3

Effects of the Process Parameters on the Properties of Sputter-Deposited Tin Oxide Thin Films

Woo, Sang Woo, Seo, Han Byeol, Choi, Jinsung, Bae, Byung Seong, Yun, Eui-Jung
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Volume:
19
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2019.16241
Date:
March, 2019
File:
PDF, 6.97 MB
english, 2019
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