![](/img/cover-not-exists.png)
Performance Evaluation and Comparison between Direct and Chemical-Assisted Picosecond Laser Micro-Trepanning of Single Crystalline Silicon
Zhu, Hao, Zhang, Zhaoyang, Xu, Kun, Xu, Jinlei, Zhu, Shuaijie, Wang, Anbin, Qi, HuanVolume:
12
Language:
english
Journal:
Materials
DOI:
10.3390/ma12010041
Date:
December, 2018
File:
PDF, 7.01 MB
english, 2018