Advantages of using Plasma FIB Over a Gallium LMIS Source

Microscopy and Microanalysis 2015 / 08 Vol. 21; Iss. S3

Advantages of using Plasma FIB Over a Gallium LMIS Source

Arey, B.W., Perera, D.E., Kovarik, L., Liu, J., Qafoku, O., Felmy, A. R., Kelley, R., Landin, T., Alvis, R.
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Volume:
21
Journal:
Microscopy and Microanalysis
DOI:
10.1017/s1431927615010788
Date:
August, 2015
File:
PDF, 248 KB
2015
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