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Journal of Lightwave Technology 2019

Simulation, Fabrication and Characterization of a Sensitive SU-8-based Fabry-Perot MOEMS Accelerometer

Taghavi, Majid, Latifi, Hamid, Parsanasab, Gholam Mohammad, Abedi, Abolfazl, Nikbakht, Hamed, Sharifi, Mohammad Javad
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Year:
2019
Journal:
Journal of Lightwave Technology
DOI:
10.1109/JLT.2019.2894752
File:
PDF, 15.71 MB
2019
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