Study of a pulsed post-discharge plasma deposition process...

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Plasma Processes and Polymers 2019 / 01

Study of a pulsed post-discharge plasma deposition process of APTES: synthesis of highly organic pp-APTES thin films with NH 2 functionalized polysilsesquioxane evidences

Bulou, Simon, Lecoq, Elodie, Loyer, François, Frache, Gilles, Fouquet, Thierry, Gueye, Magamou, Belmonte, Thierry, Choquet, Patrick
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Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201800177
Date:
January, 2019
File:
PDF, 2.25 MB
2019
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