Piezoresistive nanomechanical humidity sensors using internal stress in-plane of Si-polymer composite membranes
Md. Hossain, Mahabub, Toda, Masaya, Hokama, Takumi, Yamazaki, Mai, Moorthi, Krzysztof, Ono, TakahitoYear:
2019
Journal:
IEEE Sensors Letters
DOI:
10.1109/LSENS.2019.2893298
File:
PDF, 6 KB
2019