Piezoresistive nanomechanical humidity sensors using...

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Piezoresistive nanomechanical humidity sensors using internal stress in-plane of Si-polymer composite membranes

Md. Hossain, Mahabub, Toda, Masaya, Hokama, Takumi, Yamazaki, Mai, Moorthi, Krzysztof, Ono, Takahito
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Year:
2019
Journal:
IEEE Sensors Letters
DOI:
10.1109/LSENS.2019.2893298
File:
PDF, 6 KB
2019
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