Effect of the Annealing Temperature of the Seed Layer on the Following Main Layer in Atomic-Layer-Deposited SrTiO 3 Thin Films
Kim, Sang Hyeon, Lee, Woongkyu, An, Cheol Hyun, Kim, Dong-Gun, Kwon, Dae Seon, Cho, Seong Tak, Cha, Soon Hyung, Lim, Jun Il, Hwang, Cheol SeongJournal:
physica status solidi (RRL) - Rapid Research Letters
DOI:
10.1002/pssr.201800557
Date:
January, 2019
File:
PDF, 3.66 MB
2019