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Electron-beam radiation induced degradation of silicon nitride and its impact to semiconductor failure analysis by TEM
Liu, Binghai, Dong, Zhi Li, Hua, Younan, Fu, Chao, Li, Xiaomin, Tan, Pik Kee, Zhao, YuzheVolume:
8
Journal:
AIP Advances
DOI:
10.1063/1.5051813
Date:
November, 2018
File:
PDF, 6.28 MB
2018