Hard X-ray photoelectron spectroscopy investigation of...

Applied Surface Science 2019 / 04 Vol. 473

Hard X-ray photoelectron spectroscopy investigation of annealing effects on buried oxide in GaAs/Si junctions by surface-activated bonding

Yamajo, Shoji, Yoon, Sanji, Liang, Jianbo, Sodabanlu, Hassanet, Watanabe, Kentaro, Sugiyama, Masakazu, Yasui, Akira, Ikenaga, Eiji, Shigekawa, Naoteru
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Volume:
473
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2018.12.199
Date:
April, 2019
File:
PDF, 1.26 MB
english, 2019
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