Annealing-induced evolution in interface stability and electrical performance of sputtering-driven rare-earth-based gate oxides
Wang, Die, He, Gang, Liang, Shuang, Liu, MaoVolume:
778
Language:
english
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2018.11.209
Date:
March, 2019
File:
PDF, 2.95 MB
english, 2019