Improvement in lateral resolution of through-transmission...

Microelectronics Reliability 2019 / 02 Vol. 93

Improvement in lateral resolution of through-transmission scanning acoustic tomography using capacitive micromachined ultrasound transducer

Takezaki, Taiichi, Kawano, Masakazu, Machida, Shuntaro, Ryuzaki, Daisuke
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Volume:
93
Language:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2018.12.001
Date:
February, 2019
File:
PDF, 1.48 MB
english, 2019
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