Structural study of MgO and Mg-doped ZnO thin films grown...

Materials Science in Semiconductor Processing 2019 / 04 Vol. 93

Structural study of MgO and Mg-doped ZnO thin films grown by atomic layer deposition

Cora, Ildikó, Baji, Zsófia, Fogarassy, Zsolt, Szabó, Zoltán, Pécz, Béla
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Volume:
93
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2018.12.021
Date:
April, 2019
File:
PDF, 2.84 MB
english, 2019
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