Submicron gap reduction of micro-resonator based on porous silica ridge waveguides manufactured by standard photolithographic process
Lorrain, N., Pirasteh, P., Girault, P., Azuelos, P., Lemaître, J., Guendouz, M., Hardy, I., Thual, M., Charrier, J.Volume:
88
Language:
english
Journal:
Optical Materials
DOI:
10.1016/j.optmat.2018.11.038
Date:
February, 2019
File:
PDF, 1.82 MB
english, 2019