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Wear Characteristics of Fluorocarbon Thin Films Deposited Using Inductively Coupled and Capacitively Coupled Plasma Methods
Cho, Youn-Jeong, Jang, Yun Jung, Han, Seunghee, Lee, YeonheeVolume:
16
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2016.13535
Date:
November, 2016
File:
PDF, 385 KB
2016