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Epitaxial growth of InN thin films by plasma-enhanced atomic layer deposition
Feng, Xingcan, Peng, Hong, Gong, Jinhui, Wang, Wei, Liu, Hu, Quan, Zhijue, Pan, Shuan, Wang, LiVolume:
124
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5054155
Date:
December, 2018
File:
PDF, 1.67 MB
english, 2018