High performance thin film transistors with sputtered...

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High performance thin film transistors with sputtered In-Al-Zn-O channel and different source/drain electrodes

Xu, Weidong, Xu, Meng, Jiang, Jianfeng, Luan, Caina, Han, Lin, Feng, Xianjin
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Year:
2019
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2018.2890280
File:
PDF, 578 KB
english, 2019
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