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A Novel Actuator-Internal Micro/Nano Positioning Stage with an Arch-Shape Bridge Type Amplifier
Wang, Fujun, Huo, Zhichen, Liang, Cunman, Shi, Beichao, Tian, Yanling, Zhao, Xingyu, Zhang, DaweiYear:
2018
Language:
english
Journal:
IEEE Transactions on Industrial Electronics
DOI:
10.1109/TIE.2018.2885716
File:
PDF, 6.14 MB
english, 2018