Atomic layer deposition of ultrathin indium oxide and indium tin oxide films using a trimethylindium, tetrakis(dimethylamino)tin, and ozone precursor system
Salami, Hossein, Uy, Alan, Vadapalli, Aarathi, Grob, Corinne, Dwivedi, Vivek, Adomaitis, Raymond A.Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5058171
Date:
January, 2019
File:
PDF, 2.34 MB
english, 2019