Atomic layer deposition of ultrathin indium oxide and...

Atomic layer deposition of ultrathin indium oxide and indium tin oxide films using a trimethylindium, tetrakis(dimethylamino)tin, and ozone precursor system

Salami, Hossein, Uy, Alan, Vadapalli, Aarathi, Grob, Corinne, Dwivedi, Vivek, Adomaitis, Raymond A.
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Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5058171
Date:
January, 2019
File:
PDF, 2.34 MB
english, 2019
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