Atomic layer deposition of cobalt(II) oxide thin films from...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2019 / 01 Vol. 37; Iss. 1

Atomic layer deposition of cobalt(II) oxide thin films from Co(BTSA) 2 (THF) and H 2 O

Iivonen, Tomi, Kaipio, Mikko, Hatanpää, Timo, Mizohata, Kenichiro, Meinander, Kristoffer, Räisänen, Jyrki, Kim, Jiyeon, Ritala, Mikko, Leskelä, Markku
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Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5066638
Date:
January, 2019
File:
PDF, 1.65 MB
english, 2019
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