Selective dewetting of polymers on metal/silicon micro-patterns
Karthaus, Olaf, Terayama, Takuto, Hashimoto, YuichiVolume:
4
Year:
2006
Language:
english
Journal:
e-Journal of Surface Science and Nanotechnology
DOI:
10.1380/ejssnt.2006.656
File:
PDF, 1.09 MB
english, 2006