Selective dewetting of polymers on metal/silicon...

Selective dewetting of polymers on metal/silicon micro-patterns

Karthaus, Olaf, Terayama, Takuto, Hashimoto, Yuichi
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Volume:
4
Year:
2006
Language:
english
Journal:
e-Journal of Surface Science and Nanotechnology
DOI:
10.1380/ejssnt.2006.656
File:
PDF, 1.09 MB
english, 2006
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