Optimization Strategy for Resonant Mass Sensor Design in...

Micromachines 2010 / 12 Vol. 1; Iss. 3

Optimization Strategy for Resonant Mass Sensor Design in the Presence of Squeeze Film Damping

Li, Chengzhang, Miller, Michele H.
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Volume:
1
Journal:
Micromachines
DOI:
10.3390/microm1010112
Date:
December, 2010
File:
PDF, 390 KB
2010
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