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Determination of the stiffness properties of a complex RF MEMS by superposition and finite elements method

Yilmaz, M. Cihat, Orhan, Sadettin
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-018-4283-6
Date:
January, 2019
File:
PDF, 977 KB
english, 2019
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