Backside-illuminated CMOS Photodiodes with Embedded Polysilicon Grating Reflectors
Hung, Yung-Jr, Lu, Chen-Han, Liao, Jian-Fu, Hsieh, Min-ChunYear:
2018
Language:
english
Journal:
IEEE Photonics Technology Letters
DOI:
10.1109/LPT.2018.2889837
File:
PDF, 2.49 MB
english, 2018