Properties of conductive nitride films prepared by plasma...

Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources

Krylov, Igor, Xu, Xianbin, Weinfeld, Kamira, Korchnoy, Valentina, Ritter, Dan, Eizenberg, Moshe
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Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5075491
Date:
January, 2019
File:
PDF, 1.88 MB
english, 2019
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