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Contact resistance and lifecycle of a single- and multiple-contact MEMS switch
Uvarov, Ilia V., Marukhin, Nikita V., Naumov, Victor V.Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-018-4279-2
Date:
January, 2019
File:
PDF, 1.70 MB
english, 2019