Localized thinning for strain concentration in suspended...

AIP Advances 2018 / 11 Vol. 8; Iss. 11

Localized thinning for strain concentration in suspended germanium membranes and optical method for precise thickness measurement

Vaccaro, P. O., Alonso, M. I., Garriga, M., Gutiérrez, J., Peró, D., Wagner, M. R., Reparaz, J. S., Sotomayor Torres, C. M., Vidal, X., Carter, E. A., Lay, P. A., Yoshimoto, M., Goñi, A. R.
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Volume:
8
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5050674
Date:
November, 2018
File:
PDF, 3.25 MB
english, 2018
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