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Localized thinning for strain concentration in suspended germanium membranes and optical method for precise thickness measurement
Vaccaro, P. O., Alonso, M. I., Garriga, M., Gutiérrez, J., Peró, D., Wagner, M. R., Reparaz, J. S., Sotomayor Torres, C. M., Vidal, X., Carter, E. A., Lay, P. A., Yoshimoto, M., Goñi, A. R.Volume:
8
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.5050674
Date:
November, 2018
File:
PDF, 3.25 MB
english, 2018