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[Computer Aided Chemical Engineering] 11th International Symposium on Process Systems Engineering Volume 31 || Control Strategy for Thermal Budget and Temperature Uniformity in Spike Rapid Thermal Processing Systems
Jeng, Jyh-ChengYear:
2012
Language:
english
DOI:
10.1016/b978-0-444-59506-5.50158-9
File:
PDF, 162 KB
english, 2012