[IEEE 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Hangzhou, China (2018.8.13-2018.8.17)] 2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Waveguide Roughness Measuring Metrology with Confocal Laser Scanning Microscope (CLSM)
Shang, Hongpeng, Sun, DeGui, Jiang, HuilinYear:
2018
Language:
english
DOI:
10.1109/3m-nano.2018.8552185
File:
PDF, 452 KB
english, 2018