Experimental and computational investigations of the effect...

Physics of Plasmas 2019 / 01 Vol. 26; Iss. 1

Experimental and computational investigations of the effect of the electrode gap on capacitively coupled radio frequency oxygen discharges

You, K. H., Schulze, J., Derzsi, A., Donkó, Z., Yeom, H. J., Kim, J. H., Seong, D. J., Lee, Hyo-Chang
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Volume:
26
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.5063543
Date:
January, 2019
File:
PDF, 2.04 MB
english, 2019
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