Fabrication of Al air-bridge on coplanar waveguide

Chinese Physics B 2018 / 10 Vol. 27; Iss. 10

Fabrication of Al air-bridge on coplanar waveguide

Jin, Zhen-Chuan, Wu, Hai-Teng, Yu, Hai-Feng, Yu, Yang
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Volume:
27
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/27/10/100310
Date:
October, 2018
File:
PDF, 940 KB
english, 2018
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