The mechanistic effect over the substrate in a square type atomic layer deposition reactor
Coetzee, Rigardt Alfred Maarten, Jen, Tien-Chien, Bhamjee, Muaaz, Lu, JunlingLanguage:
english
Journal:
International Journal of Modern Physics B
DOI:
10.1142/S0217979219400186
Date:
December, 2018
File:
PDF, 1.13 MB
english, 2018