CrB2 diffusion barriers for Mo/Si multilayer structures

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Materials Research Express 2019 / 01

CrB2 diffusion barriers for Mo/Si multilayer structures

Pershyn, Yuriy Pavlovich, Gullikson, Eric M, Artyukov, Igor A., Kondratenko, V V, Voronov, D L, Devizenko, Aleksndr Yurievich, Vinogradov, Alexander V, Fedorenko, Anatoliy Ivanovich
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Journal:
Materials Research Express
DOI:
10.1088/2053-1591/ab02af
Date:
January, 2019
File:
PDF, 1023 KB
2019
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