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Design of Reconfigurable Planar Micro-Positioning Stages Based on Function Modules
Ding, Bingxiao, Yangd, Zhi-Xin, Xiao, Xiao, Zhang, GengYear:
2019
Journal:
IEEE Access
DOI:
10.1109/ACCESS.2019.2894619
File:
PDF, 6 KB
2019