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Low temperature chemical vapor deposition of superconducting molybdenum carbonitride thin films
Mohimi, Elham, Canova, Kinsey, Zhang, Zhejun, Liu, Sumeng, Mallek, Justin L., Girolami, Gregory S., Abelson, John R.Volume:
37
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5079805
Date:
March, 2019
File:
PDF, 587 KB
2019