Plasma parameters of RF capacitively coupled discharge:...

The European Physical Journal Applied Physics 2019 / 1 Vol. 85; Iss. 1

Plasma parameters of RF capacitively coupled discharge: comparative study between a plane cathode and a large hole dimensions multi-hollow cathode

Djerourou, Samira, Djebli, Mourad, Ouchabane, Mohamed
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Volume:
85
Journal:
The European Physical Journal Applied Physics
DOI:
10.1051/epjap/2019180193
Date:
January, 2019
File:
PDF, 508 KB
2019
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