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Design and trajectory tracking of a nanometric ultra-fast tool servo
Zhu, Zhiwei, Du, Hanheng, Zhou, Rongjing, Huang, Peng, Zhu, Wule, Guo, PingYear:
2019
Journal:
IEEE Transactions on Industrial Electronics
DOI:
10.1109/TIE.2019.2896103
File:
PDF, 6 KB
2019