Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2019 / 03 Vol. 37; Iss. 2
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High-density energy storage in Si-doped hafnium oxide thin films on area-enhanced substrates
Kühnel, Kati, Czernohorsky, Malte, Mart, Clemens, Weinreich, WenkeVolume:
37
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5060738
Date:
March, 2019
File:
PDF, 1.47 MB
2019