Density functional theory study on the fluorination...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2019 / 03 Vol. 37; Iss. 2

Density functional theory study on the fluorination reactions of silicon and silicon dioxide surfaces using different fluorine-containing molecules

Chowdhury, Tanzia, Hidayat, Romel, Mayangsari, Tirta Rona, Gu, Jiyeon, Kim, Hye-Lee, Jung, Jongwan, Lee, Won-Jun
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
37
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5081490
Date:
March, 2019
File:
PDF, 1.54 MB
2019
Conversion to is in progress
Conversion to is failed