Wafer-scale HfO2 encapsulated silicon nanowire field effect...

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Nanotechnology 2019 / 01

Wafer-scale HfO2 encapsulated silicon nanowire field effect transistor for efficient label-free DNA hybridization detection in dry environment

Jayakumar, Ganesh, Legallais, Maxime, Hellstrom, Per-Erik, Mouis, Mireille, Pignot-Paintrand, Isabelle, Stambouli-Sene, Valerie, Ternon, Céline, Östling, Mikael
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Journal:
Nanotechnology
DOI:
10.1088/1361-6528/aaffa5
Date:
January, 2019
File:
PDF, 1.07 MB
2019
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