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Piezoelectric-piezoresistive Coupling MEMS Sensors for Measurement of Electric Fields of Broad Bandwidth and Large Dynamic Range
Xue, Fen, Hu, Jun, Guo, Yue, Han, Guowei, Ouyang, Yong, Wang, Shan X., He, JinliangYear:
2019
Journal:
IEEE Transactions on Industrial Electronics
DOI:
10.1109/tie.2019.2893837
File:
PDF, 5 KB
2019