Texture and phase variation of ALD PbTiO 3...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2019 / 03 Vol. 37; Iss. 2

Texture and phase variation of ALD PbTiO 3 films crystallized by rapid thermal anneal

Strnad, Nicholas A., Potrepka, Daniel M., Pulskamp, Jeffrey S., Liu, Yang, Jones, Jacob L., Phaneuf, Raymond J., Polcawich, Ronald G.
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Volume:
37
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5080226
Date:
March, 2019
File:
PDF, 2.56 MB
2019
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