First results of humidity sensors based on CeO2 thick film deposited by a new deposition technique from a suspension of nanoparticles
Toloshniak, T., Guhel, Y., Besq, A., Boudart, B.Volume:
207
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2018.11.013
Date:
February, 2019
File:
PDF, 4.53 MB
english, 2019