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The influence of Marangoni effect on the growth quality of multi-crystalline silicon during the vacuum directional solidification process
Xie, Guangjie, Lv, Guoqiang, Wang, Yibo, Ma, Wenhui, Yang, Xi, Lei, YunVolume:
91
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2018.11.015
Date:
March, 2019
File:
PDF, 4.60 MB
english, 2019