Thermodynamic Simulation of Polysilicon Production in Si-H-Cl System by Modified Siemens Process
Zhou, Yang-min, Hou, Yan-qing, Nie, Zhi-feng, Xie, Gang, Ma, Wen-hui, Dai, Yong-nian, Ramachandran, Palghat A.Volume:
50
Year:
2017
Language:
english
DOI:
10.1252/jcej.16we180
File:
PDF, 969 KB
english, 2017