Thermodynamic control of MEMS meteorology pressure sensing...

IET Science Measurement & Technology 2017 / 10 Vol. 11; Iss. 7

Thermodynamic control of MEMS meteorology pressure sensing element in low-temperature application down to −45°C

Du, Lidong, Zhao, Zhan, Fang, Zhen, Feng, Yu, Yan, Jize
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Volume:
11
Journal:
IET Science, Measurement & Technology
DOI:
10.1049/iet-smt.2017.0057
Date:
October, 2017
File:
PDF, 8 KB
2017
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