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Anomalous carbon clusters in 4H-SiC/SiO 2 interfaces
Kagoyama, Y., Okamoto, M., Yamasaki, T., Tajima, N., Nara, J., Ohno, T., Yano, H., Harada, S., Umeda, T.Volume:
125
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5066356
Date:
February, 2019
File:
PDF, 2.62 MB
2019