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Imaging Interstitial Iron Concentrations in Gallium-Doped Silicon Wafers
Post, Regina, Niewelt, Tim, Schön, Jonas, Schindler, Florian, Schubert, Martin C.Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201800655
Date:
January, 2019
File:
PDF, 1.25 MB
english, 2019