Morphology controlling of 〈111〉-3C–SiC films by HMDS flow...

RSC Advances 2019 Vol. 9; Iss. 5

Morphology controlling of 〈111〉-3C–SiC films by HMDS flow rate in LCVD

Xu, Qingfang, Tu, Rong, Sun, Qingyun, Yang, Meijun, Li, Qizhong, Zhang, Song, Zhang, Lianmeng, Goto, Takashi, Ohmori, Hitoshi, Shi, Ji, Li, Haiwen, Kosinova, Marina, Bikramjit, Basu
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Volume:
9
Year:
2019
Language:
english
Journal:
RSC Advances
DOI:
10.1039/C8RA09509D
File:
PDF, 3.69 MB
english, 2019
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