Mechanism of pillars formation using four-beam interference...

Optics and Lasers in Engineering 2019 / 05 Vol. 116

Mechanism of pillars formation using four-beam interference lithography

Stankevičius, Evaldas, Daugnoraitė, Elena, Račiukaitis, Gediminas
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Volume:
116
Language:
english
Journal:
Optics and Lasers in Engineering
DOI:
10.1016/j.optlaseng.2018.12.012
Date:
May, 2019
File:
PDF, 2.87 MB
english, 2019
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