Analytical comparison of atomic layer deposition of oxide...

Analytical comparison of atomic layer deposition of oxide films inside trench and hole nanostructures

Fadeev, A.V., Rudenko, K.V.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
672
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.12.038
Date:
February, 2019
File:
PDF, 1.74 MB
english, 2019
Conversion to is in progress
Conversion to is failed