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Analytical comparison of atomic layer deposition of oxide films inside trench and hole nanostructures
Fadeev, A.V., Rudenko, K.V.Volume:
672
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2018.12.038
Date:
February, 2019
File:
PDF, 1.74 MB
english, 2019